Inspection Application (2D+3D) | Geometric coordinates measurement, e.g. CPU socket, Packaging, Solder Bumps, Parts, etc. |
Inspection speed (2D+3D): | 50cm2/sec to 15 cm2/sec (depends on MRS sensor type) |
Minimum features size: | 100μm or 70 μm (depends on MRS sensor type) |
XY R&R@1σ: | <3μm or <2μm (depends on MRS sensor type) |
Z R&R@1σ: | <2μm |
Accuracy XY: | 6μm or 5μm (depends on MRS sensor type) |
Accuracy Z: | 2μm |
Any Queries: sales@kasion.com
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