Inspection Application (2D+3D)
Geometric coordinates measurement, e.g. CPU socket, Packaging, Solder Bumps, Parts, etc.
Inspection speed (2D+3D):
50cm2/sec to 15 cm2/sec (depends on MRS sensor type)
Minimum features size:
100μm or 70 μm (depends on MRS sensor type)
XY R&R@1σ:
<3μm or <2μm (depends on MRS sensor type)
Z R&R@1σ:
<2μm
Accuracy XY:
6μm or 5μm (depends on MRS sensor type)
Accuracy Z:
2μm