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Summit LXi组件返修站
| 贴片精度: | 0.0010” (25um)平均值+3σ |
| 顶部加热器: | 2.2kW聚焦对流 |
| 底部加热器: | 8.0kW热风对流; 10.0kW/11.2kW热风对流(选件) |
| 局部加热器: | 1.0kW(选件) |
| 对位视野: | 3.2” (80mm); 90mm (选件) |
| 最大基板尺寸: | 600mm x 900mm; 650mm x 1200mm(Option) (选件) |
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