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FLEX CELL定制系统
| 悬挂式构架设计: | 各控制轴采用死循环控制无刷直流伺服马达带光栅解码器和精密滚珠丝杆滑轨 |
| 工作范围: | 500mm/600mm/800mm |
| XYZ 重复精度: | ±25 微米 (±0.001 in) |
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