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Summit LXi组件返修站

贴片精度: 0.0010” (25um)平均值+3σ
顶部加热器: 2.2kW聚焦对流
底部加热器: 8.0kW热风对流; 10.0kW/11.2kW热风对流(选件)
局部加热器: 1.0kW(选件)
对位视野: 3.2” (80mm); 90mm (选件)
最大基板尺寸: 600mm x 900mm; 650mm x 1200mm(Option) (选件)
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